铬掩模;
Through analysis on mask defect and characteristic of laser, a method of laser gasification repairing superabundance chrome in mask is proposed. Based on the principle of the laser gasification and characteristic of LMT laser repair system, the LMT laser repair system is improved.
通过对掩模缺陷和激光特点的分析,提出用激光气化法修整掩模缺陷中多余铬缺陷的技术,对LMT型激光修版机进行了改进。
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